Evolution of microstructure in Ti-Ta bilayer thin films on polycrystalline-Si and Si(001)
- A.S. Özcan
- K.F. Ludwig Jr.
- et al.
- 2004
- Thin Solid Films
Publications
Date
Featured collections
Popular topics
126 results for Ken Rodbell
Studies of deformation-induced texture development in sheet materials using diffraction techniques
- S.W. Banovic
- M.D. Vaudin
- et al.
- 2004
- Materials Science and Engineering: A
Porosity in plasma enhanced chemical vapor deposited SiCoH dielectrics: A comparative study
- A. Grill
- V.V. Patel
- et al.
- 2003
- Journal of Applied Physics
Positron annihilation techniques suited for porosity characterization of thin films
- M.P. Petkov
- C.L. Wang
- et al.
- 2003
- Journal of Physical Chemistry B
Single-event upsets in microelectronics: Fundamental physics and issues
- Henry H.K. Tang
- Kenneth P. Rodbell
- 2003
- MRS Bulletin
Nanometer-scale pores in low-k dielectric films probed by positron annihilation lifetime spectroscopy
- C.L. Wang
- M.H. Weber
- et al.
- 2002
- Applied Physics Letters
Porosity characterization by beam-based three-photon positron annihilation spectroscopy
- Mihail P. Petkov
- Marc H. Weber
- et al.
- 2001
- Applied Physics Letters
Electromigration in AlCu lines: Comparison of Dual Damascene and metal reactive ion etching
- R. Filippi
- M. Gribelyuk
- et al.
- 2001
- Thin Solid Films
Texture inheritance in Al(Cu) interconnect materials
- C.E. Murray
- K.P. Rodbell
- 2001
- Journal of Applied Physics
Opportunities and challenges in ultra low k dielectrics for interconnect applications
- S. Purushothaman
- S.V. Nitta
- et al.
- 2001
- Technical Digest-International Electron Devices Meeting