Publications

35 results for Alwin E. Michel

Boron, phosphorus, and arsenic diffusion in tisi₂
- - P. Gas
  - V.R. Deline
  - et al.
- 1986
- Journal of Applied Physics
In Situ Arsenic-Doped Polysilicon for VLSI Applications
- - Maurizio Arienzo
  - Andrew C. Megdanis
  - et al.
- 1986
- IEEE T-ED
Investigation of transient diffusion effects in rapid thermally processed ion implanted arsenic in silicon
- - T.O. Sedgwick
  - Alwin E. Michel
  - et al.
- 1985
- Applied Physics Letters
LPCVD IN-SITU ARSENIC DOPED POLYSILICON FOR VLSI APPLICATIONS.
- - M. Arienzo
  - A.C. Megdanis
  - et al.
- 1984
- IEDM 1984
Channeling in low energy boron ion implantation
- - Alwin E. Michel
  - R.H. Kastl
  - et al.
- 1984
- Applied Physics Letters
The poly-single crystalline silicon interface
- - C.Y. Wong
  - Alwin E. Michel
  - et al.
- 1984
- Journal of Applied Physics
Diffusion of arsenic in bilayer polycrystalline silicon films
- - M. Arienzo
  - Y. Komem
  - et al.
- 1984
- Journal of Applied Physics
Ion-implanted polysilicon diffusion sources
- - Alwin E. Michel
  - R.H. Kastl
  - et al.
- 1983
- Nuclear Instruments and Methods In Physics Research
Effects of Impurity Compensation on Injection Current in Si Bipolar Transistors
- - D.D. Tang
  - Alwin E. Michel
- 1980
- IEEE T-ED
High-energy emission in GaAs electroluminescent diodes
- - M.I. Nathan
  - T.N. Morgan
  - et al.
- 1966
- Physical Review