Modification of thin film properties by ion bombardment during deposition
- James M.E. Harper
- Jerome J. Cuomo
- et al.
- 1985
- Nuclear Inst. and Methods in Physics Research, B
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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122 results for J.M.E. Harper
Reactive sputtering of copper and silicon near the sputtering threshold
- T.M. Mayer
- J.M.E. Harper
- et al.
- 1985
- JVSTA
Electron spectroscopy study of hydrogenated amorphous carbon films formed by methane ion beam deposition
- P. Oelhafen
- J. Freeouf
- et al.
- 1984
- Thin Solid Films
Summary Abstract: A Quantitative Ion Beam Process Applied to the Deposition of Aluminum Nitride Thin Films
- J.M.E. Harper
- H.T.G. Hentzell
- et al.
- 1984
- JVSTA
Quantitative ion beam process for the deposition of compound thin films
- J.M.E. Harper
- J.J. Cuomo
- et al.
- 1983
- Applied Physics Letters
Summary Abstract: Developments in broad-beam ion source technology and applications
- H.R. Kaufman
- J.J. Cuomo
- 1983
- JVSTA
Oxidation processes using ion beams
- A.W. Kleinsasser
- J.M.E. Harper
- et al.
- 1982
- Thin Solid Films
Effects of beam, target and substrate potentials in ion beam processing
- J.M.E. Harper
- 1982
- Thin Solid Films
Ion beam oxidation
- J.M.E. Harper
- M. Heiblum
- et al.
- 1981
- Journal of Applied Physics
Thermal properties of layered transition-metal dichalcogenides at charge-density-wave transitions
- J.M.E. Harper
- T.H. Geballe
- et al.
- 1977
- Physical Review B