Dependence of crystallographic texture of C54 TiSi2 on thickness and linewidth in submicron CMOS structures
- V. Svilan
- K.P. Rodbell
- et al.
- 1996
- MRS Spring Meeting 1996
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122 results for J.M.E. Harper
Reduction of the C54-TiSi2 phase transformation temperature using refractory metal ion implantation
- R. Mann
- G.L. Miles
- et al.
- 1995
- Applied Physics Letters
Light scattering measurement of surface topography during formation of titanium silicide
- C. Lavoie
- C. Cabral Jr.
- et al.
- 1995
- MRS Fall Meeting 1995
Thermal stability of silicide on polycrystalline Si
- Q.Z. Hong
- Stella Q. Hong
- et al.
- 1994
- Thin Solid Films
Giant magnetoresistance in Co/Cu multilayers after annealing
- T.R. McGuire
- J.M.E. Harper
- et al.
- 1994
- Journal of Applied Physics
Kinetics of Al grain growth, Al2Cu precipitation, and dissolution in blanket thin films and fine lines
- E.G. Colgan
- K.P. Rodbell
- et al.
- 1994
- Journal of Applied Physics
Crystallographic texture change during abnormal grain growth in Cu-Co thin films
- J.M.E. Harper
- J. Gupta
- et al.
- 1994
- Applied Physics Letters
Intermetallic formation in copper/magnesium thin films - Kinetics, nucleation and growth, and effect of interfacial oxygen
- B. Arcot
- S.P. Murarka
- et al.
- 1994
- Journal of Applied Physics
Giant magnetoresistance of dilute Cu(Co) granular films
- R.J. Gambino
- T.R. McGuire
- et al.
- 1994
- Journal of Applied Physics
Stresses and morphological instabilities in silicide/polycrystalline Si layered structures
- Q.Z. Hong
- F.M. D'Heurle
- et al.
- 1993
- Applied Physics Letters