HF surface passivation failure in integrated thermal oxidation processing
- M. Liehr
- M. Offenberg
- et al.
- 1990
- SSDM 1990
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72 results for G.W. Rubloff
Microvoids and defect chemistry at the SiSiO2 interface studied by positron annihilation depth profiling
- G.W Rubloff
- B Nielsen
- et al.
- 1990
- Vacuum
Defect microchemistry in Si02/Si structures
- G.W. Rubloff
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Microvoids at the SiO2/Si interface
- Bent Nielsen
- K.G. Lynn
- et al.
- 1989
- Physical Review B
Surface analysis of realistic semiconductor microstructures
- Gottlieb S. Oehrlein
- Kevin K. Chan
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Fundamentals of laser photoemission for testing high speed devices and circuits
- G.W. Rubloff
- H. Beha
- 1987
- Advances in Semiconductors and Semiconductor Structures 1987
Kinetics of high-temperature thermal decomposition of Si0 2 on Si(100)
- M. Liehr
- J.E. Lewis
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract’ Integrated system for studies of thln-film chemical growth processes on silicon wafers
- M. Liehr
- S. Gates
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Defect microchemistry at the SiO2/Si interface
- G.W. Rubloff
- K. Hofmann
- et al.
- 1987
- Physical Review Letters
High temperature reaction and defect chemistry at the Si/SiO2 interface
- K. Hofmann
- G.W. Rubloff
- et al.
- 1987
- Applied Surface Science