Unoxidized porous Si as an isolation material for mixed-signal integrated circuit applications
- Han-Su Kim
- Ya-Hong Xie
- et al.
- 2003
- Journal of Applied Physics
Publications
2360 results at Journal of Applied Physics
Physical and electrical properties of reactive molecular-beam-deposited aluminum nitride in metal-oxide-silicon structures
- L.Å. Ragnarsson
- N.A. Bojarczuk
- et al.
- 2003
- Journal of Applied Physics
Relationship between copper concentration and stress during electromigration in an Al(0.25 at.% Cu) conductor line
- H.K. Kao
- G.S. Cargill III
- et al.
- 2003
- Journal of Applied Physics
Comment on "unified compact theory of tunneling gate current in metal-oxide-semiconductor structures: Quantum and image force barrier lowering" [Journal of Applied Physics 92, 3724 (2002)]
- M.V. Fischetti
- 2003
- Journal of Applied Physics
Thermal expansion of the isostructural PtSi and NiSi: Negative expansion coefficient in NiSi and stress effects in thin films
- C. Detavernier
- C. Lavoie
- et al.
- 2003
- Journal of Applied Physics
Relationship between interfacial adhesion and electromigration in Cu metallization
- M.W. Lane
- E. Liniger
- et al.
- 2003
- Journal of Applied Physics
Plasma enhanced chemical vapor deposited SiCOH dielectrics: From low-k to extreme low-k interconnect materials
- Alfred Grill
- 2003
- Journal of Applied Physics
Incoherent neutron scattering and the dynamics of thin film photoresist polymers
- Christopher L. Soles
- Jack F. Douglas
- et al.
- 2003
- Journal of Applied Physics
High-resolution x-ray diffraction for characterization and monitoring of silicon-on-insulator fabrication processes
- G.M. Cohen
- P.M. Mooney
- et al.
- 2002
- Journal of Applied Physics
Growth and characterization of epitaxial Si/(LaxY1-x)2O3/Si heterostructures
- Vijay Narayanan
- Supratik Guha
- et al.
- 2002
- Journal of Applied Physics