Reactive ion etching lag investigation of oxide etching in fluorocarbon electron cyclotron resonance plasmas
- O. Joubert
- G.S. Oehrlein
- et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
Date
Featured collections
Popular topics
357 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Quantum size effects in ultrathin Cu(100) films
- G.J. Mankey
- R.F. Willis
- et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Force Microscopy with Actively Stabilized Differential Fiber Detection Mechanism
- H.K. Wickramasinahe
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Carrier Injection and Scanning Tunneling Microscopy at the Si(111)-2x1 Surface
- R.M. Feenstra
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Role of Stress Relief in the Hexagonai=Close=Packed to Face-Centered-Cubic Phase Transformation in Cobalt Thin Films
- D.A. Smith
- K. Barmak
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Density of States and Hot Electron Effects in Ballistic Electron Emission Spectroscopy
- R. Ludeke
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Electron and Hole Spin Lifetimes in zn1-xMnxSe and Zn1-yFeyse Based Heterostructures
- L.P. Fu
- W.Y. Yu
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Control of as Diffusion using Ultrathin Metal Passivating Layers at GaAs(100) Surfaces
- P.D. Kirchner
- G.D. Pettit
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Temperature-Dependent Composition, Ordering, and Band Bending at Gap(100) Surfaces
- C.L. Lin
- L.J. Brillson
- et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Tunnel Current Controlled Atomic Force Microscope Designs
- P.J. Bryant
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films