Atomic force microscopy using optical interferometry
- R. Erlandsson
- G.M. Mcclelland
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Valence-band photoemission and electron energy-loss studies of reactive ion etched silicon dioxide
- S.W. Robey
- G.S. Oehrlein
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Diffusion of boron, phosphorus, and arsenic implanted in thin films of cobalt disilicide
- O. Thomas
- P. Gas
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Control of microstructure and properties of copper films using ion-assisted deposition
- R.A. Roy
- J.J. Cuomo
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Current-voltage relations in magnetrons
- S.M. Rossnagel
- H.R. Kaufman
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Reconstruction of steps on the Si(111)2x1 surface
- R.M. Feenstra
- Joseph A. Stroscio
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Promotion of dissociative chemisorption with vibrational and translational energy
- C.T. Rettner
- H.E. Pfnür
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
High-rate reactive sputter deposition of zirconium dioxide
- Fletcher Jones
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Analysis of Co-doped iron oxide thin films by grazing incidence x-ray diffraction
- Michael F. Toney
- Ting C. Huang
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The change in Si-AI bonding with metal coverage at the Si(111)^3 xV3-AI interface
- J.S. Nelson
- Inder P. Batra
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films