Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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310 results at Thin Solid Films

Hydrazine-based deposition route for device-quality CIGS films
- - David B. Mitzi
  - Min Yuan
  - et al.
- 2009
- Thin Solid Films
Fabrication of uniaxially strained silicon nanowires
- - S.F. Feste
  - J. Knoch
  - et al.
- 2008
- Thin Solid Films
Supercritical CO₂/co-solvent extraction of porogens and surfactant templates to obtain ultralow dielectric constant films
- - A.A. Lubguban
  - J.A. Lubguban
  - et al.
- 2008
- Thin Solid Films
In-situ X-ray Diffraction study of Metal Induced Crystallization of amorphous silicon
- - W. Knaepen
  - C. Detavernier
  - et al.
- 2008
- Thin Solid Films
Plasma ash processing solutions for advanced interconnect technology
- - N. Fuller
  - M.A. Worsley
  - et al.
- 2008
- Thin Solid Films
Chemical and structural modifications in a 193-nm photoresist after low-k dry etch
- - E. Kesters
  - M. Claes
  - et al.
- 2008
- Thin Solid Films
Interfacial microstructure of NiSi_x/HfO₂/SiO_x/Si gate stacks
- - M. Gribelyuk
  - C. Cabral Jr.
  - et al.
- 2007
- Thin Solid Films
Nanoporous organosilicate films as antireflection coatings
- - Koushik Biswas
  - Shubhra Gangopadhyay
  - et al.
- 2006
- Thin Solid Films
Effect of oxygen at the Cu-SiC_xN_y interface on electromigration performance of interconnect structures
- - E. Liniger
  - C. Dziobkowski
- 2006
- Thin Solid Films
Underlayer effects on texture evolution in copper films
- - C.E. Murray
  - K.P. Rodbell
  - et al.
- 2006
- Thin Solid Films