Chemical Vapor Deposition of Epitaxial Silicon from Silane at Low Temperatures: I. Very Low Pressure Deposition
- James H. Comfort
- Rafael Reif
- 2019
- JES
Publications
14338 results for Physical Sciences
On the Temperature Dependence of Majority Carrier Transport in Heavily Arsenic-Doped Polycrystalline Silicon Thin Films
- John D. Cressler
- Wei Hwang
- et al.
- 2019
- JES
Chemical Surface-Modification of a Polyimide: Characterization and a Kinetic Study on the Diffusion of Ions in a Modified Polymer
- Miro M. Plechaty
- Richard R. Thomas
- 2019
- JES
Electrochemical Properties of Polyimides and Related Imide Compounds
- A. Viehbeck
- M.J. Goldberg
- et al.
- 2019
- JES
Comparison of the Activity of PdSn Colloidal Catalysts with the Activity of Pure Metals for HCHO Oxidation: Enhancement of the Activity by Ionic Tin
- Jean Horkans
- 2019
- JES
Selective dry etching of germanium with respect to silicon and vice versa
- G.S. Oehrlein
- T.D. Bestwick
- et al.
- 2019
- JES
Thermally Developable, Positive Resist Systems with High Sensitivity
- Hiroshi Ito
- Reinhold Schwalm
- 2019
- JES
Grazing Incidence X-Ray and Electrochemical Study of Thin Film Copper(111) on Mica
- Gary L. Barges
- Mahesh G. Samant
- 2019
- JES
Kinetics of Oxygen Gas Evolution on Hydrous Rhodium Oxide Films
- Eugene J.M. O'Sullivan
- Laurence D. Burke
- 2019
- JES
Elimination of End-of-Range Shallow Junction Implantation Damage during CMOS Titanium Silicidation
- G.A. Rozgonyi
- 2019
- JES