Publications

509 results at JES

An electron microscope investigation of the effect of phosphorous doping on the plasma etching of polycrystalline silicon
- - E.A. Irene
  - E. Tierney
  - et al.
- 2019
- JES
Anomalous Etch Structures Using Ethylenediamine-Pyrocatechol-Water Based Etchants and Their Elimination
- - A. Reisman
  - M. Berkenblit
  - et al.
- 2019
- JES
The Formation of SiO₂ in an RF Generated Oxygen Plasma: II. The Pressure Range Above 10 mTorr
- - A. Ray
  - A. Reisman
- 2019
- JES
On Fitting Error Functions to Data
- - R. Ghez
  - M.B. Small
- 2019
- JES
Effect of Plating Parameters on Electrodeposited Nife
- - Jean Horkans
- 2019
- JES
High Temperature Flow Resistance of Micron Sized Images in AZ Resists
- - H. Hiraoka
  - J. Pacansky
- 2019
- JES
Effect of V2O3 Addition on the Thermoluminescence and Phosphorescence of Tb-Activated Garnet Phosphors
- - Takeshi Takamori
  - Stephen Fine
  - et al.
- 2019
- JES
Effects of Several Parameters on the Corrosion Rates of Al Conductors in Integrated Circuits
- - Israel Lerner
  - Jerome M. Eldridge
- 2019
- JES
The Fabrication of High Precision Nozzles by the Anisotropic Etching of (100) Silicon
- - E. Bassous
  - E.F. Baran
- 2019
- JES
Electron Beam-Induced Reactions of Orthonaphthoquinone-Diazide-Sulfonyl Derivatives in Phenolic-Type Resins
- - Hiroyuki Hiraoka
  - Adolfo R. Gutierrez
- 2019
- JES