Developer Temperature Effects on E-Beam and Optically Exposed Positive Photoresist
- J.M. Shaw
- M. Hatzakis
- 2019
- JES
Publications
509 results at JES
Radiochemical Analysis of β-Al2O3, and the Preparation of Na-22 Tagged Monocrystals
- L.M. Foster
- J.E. Scardefield
- 2019
- JES
The Formation of SiO2 in an RF Generated Oxygen Plasma: II. The Pressure Range Above 10 mTorr
- A. Ray
- A. Reisman
- 2019
- JES
On the Removal of Insulator Process Induced Radiation Damage from Insulated Gate Field Effect Transistors at Elevated Pressure
- A. Reisman
- J.M. Aitken
- et al.
- 2019
- JES
Parameter Dependence of RIE Induced Radiation Damage in Silicon Dioxide
- L.M. Ephrarh
- D.J. Dimaria
- et al.
- 2019
- JES
Etching Silicon with Fluorine Gas
- M. Chen
- V.J. Minkiewicz
- et al.
- 2019
- JES
High Temperature Flow Resistance of Micron Sized Images in AZ Resists
- H. Hiraoka
- J. Pacansky
- 2019
- JES
Interactions Between Cr and Pt Films: New Cr-Pt Phases
- J.E.E. Baglin
- F.M. d'Heurle
- et al.
- 2019
- JES
TiO2 Antireflection Coatings by a Low Temperature Spray Process
- H.J. Hovel
- 2019
- JES
All Dry Lithography Processes and Mechanistic Studies with Poly(methacrylonitrile) and Related Polymers
- H. Hiraoka
- 2019
- JES