John G. Long, Peter C. Searson, et al.
JES
Wc have used time-of-flight static secondary ion mass spectrometry (ToF-SSIMS), and X-ray photoelectron spectroscopy (XPS), to study films produced by exposure of water plasma treated chromium and silicon surfaces to aqueous solutions of 3-aminopropyltrihydroxysilane (3-APTHS). The chemical structure of positive and negative secondary ions produced by these films was deduced by a combination of exact mass determination and the use of isotopically labelled 3-APTHS. Ions characteristic of the 3-APTHS overlayer were observed for both surfaces. The use of18O labelled 3-APTHS yields interesting insight into the cross-linking nature of the films studied, suggesting no further cross-linking of the silane as a function of in situ thermal exposure. XPS studies of these samples support the ToF-SSIMS data showing similarity of 3-APTHS bonding to the two surfaces studied. © VSP 1992.
John G. Long, Peter C. Searson, et al.
JES
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
R.W. Gammon, E. Courtens, et al.
Physical Review B
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films