A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
Electrostatic discharge (ESD) performance of a shallow-trench-isolation double-diode protection circuit in CMOS technology is discussed. This paper highlights the sensitivities of these devices to semiconductor process parameters, interaction with chip circuitry and advanced failure analysis techniques. © 1993.
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Peter J. Price
Surface Science