Compact pulsed molecular beam system for real-time reactive scattering from solid surfaces
- Benjamin N. Eldridge
- Ming L. Yu
- 1987
- Review of Scientific Instruments
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66 results for Ming L. Yu
Summary abstract: Time-resolved study of oxygen reaction on si(100) surfaces using pulsed molecular beam reactive scattering
- Ming L. Yu
- Benjamin N. Eldridge
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary abstract: On the quantitative aspects of oxygen enhancement in secondary ion mass spectrometry
- Ming L. Yu
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Effect of chemical bonding on positive secondary-ion yields in sputtering
- K. Mann
- M.L. Yu
- 1987
- Physical Review B
Doping reaction of PH3 and B2H6 with Si(100)
- Ming L. Yu
- D.J. Vitkavage
- et al.
- 1986
- Journal of Applied Physics
Mechanisms of atomic ion emission during sputtering
- Ming L. Yu
- Norton D. Lang
- 1986
- Nuclear Inst. and Methods in Physics Research, B
Chemical enhancement effects in SIMS analysis
- Ming L. Yu
- 1986
- Nuclear Inst. and Methods in Physics Research, B
A bond breaking model for secondary ion emission
- Ming L. Yu
- 1986
- Nuclear Inst. and Methods in Physics Research, B
Summary Abstract: Comparison between the adsorption of PH3 and B2H6 on Si surfaces as related to the CVD of Si
- M.L. Yu
- D.J. Vitkavage
- et al.
- 1985
- JVSTA
Summary Abstract: The origin of oxidation induced enhancement of Si+ sputter yield in SIMS
- D.J. Vitkavage
- J.G. Clabes
- et al.
- 1985
- JVSTA