Chemical enhancement effects in SIMS analysis
- Ming L. Yu
- 1986
- Nuclear Inst. and Methods in Physics Research, B
Publications
Date
Featured collections
Popular topics
66 results for Ming L. Yu
A bond breaking model for secondary ion emission
- Ming L. Yu
- 1986
- Nuclear Inst. and Methods in Physics Research, B
Summary Abstract: The origin of oxidation induced enhancement of Si+ sputter yield in SIMS
- D.J. Vitkavage
- J.G. Clabes
- et al.
- 1985
- JVSTA
Summary Abstract: Comparison between the adsorption of PH3 and B2H6 on Si surfaces as related to the CVD of Si
- M.L. Yu
- D.J. Vitkavage
- et al.
- 1985
- JVSTA
IN-SITU DOPED SILICON VIA LPCVD; INTERACTIONS OF THE DOPANT/SILANE/SILICON SURFACE SYSTEM.
- B.S. Meyerson
- M.L. Yu
- 1983
- International Conference on Chemical Vapor Deposition 1983
IN SITU DOPED SILICON VIA LPCVD: INTERACTIONS OF THE DOPANT/SILANE/SILICON SURFACE SYSTEM.
- B.S. Meyerson
- M.L. Yu
- 1983
- ECS Meeting 1983
GAS/SURFACE INTERACTIONS RELEVANT TO CHEMICAL VAPOR DEPOSITION TECHNIQUES.
- B.S. Meyerson
- M.L. Yu
- 1983
- American Institute of Chemical Engineers Annual Meeting 1983
Anomalous coverage dependence of secondary-ion emission from overlayers
- Ming L. Yu
- 1984
- Physical Review B
The Adsorption of PH3 on Si(100) and its Effect on the Coadsorption of SiH4
- Ming L. Yu
- B.S. Meyerson
- 1984
- JVSTA
The effect of oxygen on the sputtering of metastable atoms and ions from Ba metal
- D. Grischkowsky
- Ming L. Yu
- et al.
- 1983
- Surface Science