Gas cluster ion beam assisted NiPt germano-silicide formation on SiGe
- Ahmet S. Ozcan
- Christian Lavoie
- et al.
- 2016
- Journal of Applied Physics
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33 results for Ahmet S. Ozcan
Challenges of nickel silicidation in CMOS technologies
- Nicolas Breil
- Christian Lavoie
- et al.
- 2015
- Microelectronic Engineering
Compositional dependence of the optical conductivity of Ni1 - XPtx alloys (0 < x < 0.25) determined by spectroscopic ellipsometry
- Lina S. Abdallah
- Stefan Zollner
- et al.
- 2014
- Thin Solid Films
Optical conductivity of Ni1-xPtxSi monosilicides (0 < x < 0.3) from spectroscopic ellipsometry
- Lina S. Abdallah
- Stefan Zollner
- et al.
- 2014
- JVSTB
Optical conductivity of Ni1- XPtx alloys (0< x <0.25) from 0.76 to 6.6 eV
- Lina S. Abdallah
- Tarek M. Tawalbeh
- et al.
- 2014
- AIP Advances
Effects of temperature dependent pre-amorphization implantation on NiPt silicide formation and thermal stability on Si(100)
- Ahmet S. Ozcan
- Donald Wall
- et al.
- 2013
- Applied Physics Letters
Ultra low contact resistivities for CMOS beyond 10-nm node
- Zhen Zhang
- Siyuranga Obasa Koswatta
- et al.
- 2013
- IEEE Electron Device Letters
Leakage and contact resistance reduction by diffusion of dopants in NiPt suicide
- Ahmet Ozcan
- Ming Cai
- et al.
- 2011
- ADMETA 2011
Exploitation of a self-limiting process for reproducible formation of ultrathin Ni1-x Ptx silicide films
- Zhen Zhang
- Bin Yang
- et al.
- 2010
- Applied Physics Letters
Effective schottky barrier lowering for contact resistivity reduction using silicides as diffusion sources
- Zhen Zhang
- F. Pagette
- et al.
- 2010
- VLSI-TSA 2010