Selective Wet and Dry Etching of Hydrogenated Amorphous Silicon and Related Materials
- I. Haller
- Y.H. Lee
- et al.
- 2019
- JES
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38 results for Y.H. Lee
Feature-Size Dependence of Etch Rate in Reactive Ion Etching
- Young H. Lee
- Zhen H. Zhou
- 2019
- JES
EPR Observation of an Au‐Fe Complex in Silicon: I. Experimental Data
- R.L. Kleinhenz
- Y.H. Lee
- et al.
- 2006
- physica status solidi (b)
Study of near‐surface disorder and surface residues after reactive Ion etching of Silicon
- G.S. Oehrlein
- G.J. Coyle
- et al.
- 2004
- Surface and Interface Analysis
Silicon di-interstitial in ion-implanted silicon
- Young Hoon Lee
- 1998
- Applied Physics Letters
A role of energetic ions in RF-biased PECVD of TiO2
- Young Hoon Lee
- 1998
- Vacuum
Strain relaxation in silicon-germanium microstructures observed by resonant tunneling spectroscopy
- A. Zaslavsky
- K.R. Milkove
- et al.
- 1995
- Applied Physics Letters
Lithography and fabrication processes for sub-100 nm scale complementary metal-oxide semiconductor
- S.J. Wind
- Y. Taur
- et al.
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Plasma enhanced chemical vapor deposition of TiO2 in microwave-radio frequency hybrid plasma reactor
- Young H. Lee
- Kevin K. Chan
- et al.
- 1995
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Fabrication of three-terminal resonant tunneling devices in silicon-based material
- A. Zaslavsky
- K.R. Milkove
- et al.
- 1994
- Applied Physics Letters