SiGe-base bipolar transistors for cryogenic BiCMOS applications
- John D. Cressler
- 1992
- Microelectronic Engineering
Publications
221 results at Microelectronic Engineering
Understanding high numerical aperture optical lithography
- D. Flagello
- Alan E. Rosenbluth
- et al.
- 1992
- Microelectronic Engineering
Positive mode silylation process characterization
- D.C. La Tulipe
- A.T.S. Pomerene
- et al.
- 1992
- Microelectronic Engineering
Definition and measurement rule for voltage resolution of contactless testing systems based on electron-beam or photoemission methods
- R. Clauberg
- R. Lackmann
- 1992
- Microelectronic Engineering
Annealing behavior of gold absorber in x-ray masks
- R.E. Acosta
- W.A. Johnson
- et al.
- 1992
- Microelectronic Engineering
Overlay measurement using the low voltage scanning electron microscope
- Michael G. Rosenfield
- A. Starikov
- 1992
- Microelectronic Engineering
Picosecond backside optical detection of internal signals in flip-chip mounted silicon VLSI circuits
- H. Heinrich
- N. Pakdaman
- et al.
- 1992
- Microelectronic Engineering
A study of proximity effects at high electron-beam voltages for x-ray mask fabrication part 1: Additive mask processes
- Michael G. Rosenfield
- S. Rishton
- et al.
- 1991
- Microelectronic Engineering
Comparison of vapor and liquid phase silylation processes of photoresists
- E. Babich
- J. Paraszczak
- et al.
- 1991
- Microelectronic Engineering
Acid hardenable, spin-coatable silicon ladder polymer systems as resist materials
- Hiroyuki Hiraoka
- Tsuguo Yamaoka
- 1991
- Microelectronic Engineering