SiCGe ternary alloys - extending Si-based heterostructures
- Subramanian S. Iyer
- K. Eberl
- et al.
- 1992
- Microelectronic Engineering
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221 results at Microelectronic Engineering
Liquid film enhanced laser cleaning
- W. Zapka
- A.C. Tam
- et al.
- 1992
- Microelectronic Engineering
Overlay measurement using the low voltage scanning electron microscope
- Michael G. Rosenfield
- A. Starikov
- 1992
- Microelectronic Engineering
Definition and measurement rule for voltage resolution of contactless testing systems based on electron-beam or photoemission methods
- R. Clauberg
- R. Lackmann
- 1992
- Microelectronic Engineering
Optical analysis of wet chemically etched InGaAs/InP wires
- B. Jacobs
- M. Emmerling
- et al.
- 1992
- Microelectronic Engineering
SiGe-base bipolar transistors for cryogenic BiCMOS applications
- John D. Cressler
- 1992
- Microelectronic Engineering
Positive mode silylation process characterization
- D.C. La Tulipe
- A.T.S. Pomerene
- et al.
- 1992
- Microelectronic Engineering
Acid hardenable, spin-coatable silicon ladder polymer systems as resist materials
- Hiroyuki Hiraoka
- Tsuguo Yamaoka
- 1991
- Microelectronic Engineering
The electron beam proximity printing lithography, a candidate for the 0.35 and 0.25 micron chip generations
- U. Behringer
- W. Haug
- et al.
- 1991
- Microelectronic Engineering
X-ray mask distortion due to radiation damage
- R.E. Acosta
- 1991
- Microelectronic Engineering