Effects of beam, target and substrate potentials in ion beam processingJ.M.E. Harper1982Thin Solid Films
Preparation of Pb-Bi film by alloy evaporation I: Film composition controlH.-C.W. HuangB.L. Gilbert1982Thin Solid Films
Low temperature doping of arsenic atoms in silicon during Pd2Si formationI. OhdomariK. Suguroet al.1982Thin Solid Films
Electronic states and microstructure at the silicide-silicon interfaceP.S. HoG.W. Rubloff1982Thin Solid Films
Strain relaxation mechanisms of lead and lead alloy thin films on silicon substratesMasanori MurakamiTung-Sheng Kuanet al.1982Thin Solid Films
A computer calculation of step coverage in SiO thin filmsG.R. ProtoI.A. Blechet al.1982Thin Solid Films
Optical optimization of line deletion and personalization parameters on polymide filmsP.B. PerryS.K. Rayet al.1981Thin Solid Films