Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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310 results at Thin Solid Films

Effects of beam, target and substrate potentials in ion beam processing
- - J.M.E. Harper
- 1982
- Thin Solid Films
Preparation of Pb-Bi film by alloy evaporation I: Film composition control
- - H.-C.W. Huang
  - B.L. Gilbert
- 1982
- Thin Solid Films
Tracer diffusion in amorphous Pd₈₀Si₂₀ and Gd₁₆Co₈₄ films
- - D. Gupta
  - K.N. Tu
  - et al.
- 1982
- Thin Solid Films
Low temperature doping of arsenic atoms in silicon during Pd₂Si formation
- - I. Ohdomari
  - K. Suguro
  - et al.
- 1982
- Thin Solid Films
Electronic states and microstructure at the silicide-silicon interface
- - P.S. Ho
  - G.W. Rubloff
- 1982
- Thin Solid Films
A computer calculation of step coverage in SiO thin films
- - G.R. Proto
  - I.A. Blech
  - et al.
- 1982
- Thin Solid Films
Strain relaxation mechanisms of lead and lead alloy thin films on silicon substrates
- - Masanori Murakami
  - Tung-Sheng Kuan
  - et al.
- 1982
- Thin Solid Films
The electronic structure of impurities and defects in SiO₂
- - Sokrates T. Pantelides
- 1982
- Thin Solid Films
R.F. Sputtering of LiNbO₃ thin films
- - G.H. Hewig
  - K. Jain
  - et al.
- 1982
- Thin Solid Films
Optical optimization of line deletion and personalization parameters on polymide films
- - P.B. Perry
  - S.K. Ray
  - et al.
- 1981
- Thin Solid Films