K.A. Chao
Physical Review B
This paper presents an overview of issues associated with Al dual damascene process technology. Different integration schemes are discussed and characteristics of metal fill, planarization and reliability are highlighted. Finally, a comparison is made between Al dual damascene, Al RIE, and Cu dual damascene.
K.A. Chao
Physical Review B
R. Ghez, M.B. Small
JES
H.D. Dulman, R.H. Pantell, et al.
Physical Review B
J.C. Marinace
JES