Y. Taur, Y. Mii, et al.
IBM J. Res. Dev
Very high-transconductance 0.1-um surface-channel opMOSFET devices are fabricated with p+-poly gate on 35-A-thick gate oxide. A 600-A-deep p + source-drain extension is used with self-aligned TiSi2to achieve low series resistance. The saturation transconductances, 400 mS/mm at 300 K and 500 mS/mm at 77 K, are the highest reported to date for pMOSFET devices. © 1993 IEEE
Y. Taur, Y. Mii, et al.
IBM J. Res. Dev
Wen-Hsing Chang, Bijan Davari, et al.
IEEE T-ED
E.B. Foxman, U. Meirav, et al.
Physical Review B
C.-K. Hu, N.J. Mazzeo, et al.
Thin Solid Films