W. Chen, Y. Taur, et al.
VLSI Technology 1996
Very high-transconductance 0.1-um surface-channel opMOSFET devices are fabricated with p+-poly gate on 35-A-thick gate oxide. A 600-A-deep p + source-drain extension is used with self-aligned TiSi2to achieve low series resistance. The saturation transconductances, 400 mS/mm at 300 K and 500 mS/mm at 77 K, are the highest reported to date for pMOSFET devices. © 1993 IEEE
W. Chen, Y. Taur, et al.
VLSI Technology 1996
Yuan Taur, Genda J. Hu, et al.
IEEE T-ED
Yuan Taur, Tak H. Ning
Materials Chemistry and Physics
James Warnock, Ghavam G. Shahidi, et al.
IEEE Electron Device Letters