Gate-all-around silicon nanowire MOSFETs and circuits
Jeffrey W. Sleight, Sarunya Bangsaruntip, et al.
DRC 2010
We have fabricated undoped-body short-channel extremely thin silicon-on-insulator (ETSOI) field-effect transistors (FETs) with 8-nm SOI thickness that exhibit the expected short-channel benefit compared with doped partially depleted SOI (PDSOI) FETs. Using a source/drain extension (SDE) last process with the SDE implants activated with diffusionless laser anneal, we demonstrate that the series resistance penalty can be minimized, which leads to ETSOI FET drive currents that are comparable to those of conventional thick-body PDSOI FETs. © 2008 IEEE.
Jeffrey W. Sleight, Sarunya Bangsaruntip, et al.
DRC 2010
Yanning Sun, Amlan Majumdar, et al.
IEDM 2014
Lynne M. Gignac, Surbhi Mittal, et al.
Microscopy and Microanalysis
Zhibin Ren, M. Ieong, et al.
IEDM 2005