J. Freeouf, Alan C. Warren, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
No abstract available.
J. Freeouf, Alan C. Warren, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
M.L. Lovejoy, M.R. Melloch, et al.
Applied Physics Letters
M.L. Lovejoy, M.R. Melloch, et al.
Applied Physics Letters
M.R. Melloch, J. Woodall, et al.
Annual Review of Materials Science