M.L. Lovejoy, M.R. Melloch, et al.
Applied Physics Letters
No abstract available.
M.L. Lovejoy, M.R. Melloch, et al.
Applied Physics Letters
M.R. Melloch, J. Woodall, et al.
Materials Science and Engineering B
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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Nathaniel A. Dodds, James R. Schwank, et al.
IEEE TNS