Contribution of EUV resist counting statistics to stochastic printing failures
- William D. Hinsberg
- Gregory M. Wallraff
- et al.
- 2021
- JM3
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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101 results for Gregory M. Wallraff
Electro-oxidation of some soluble alkyl and aryl substituted polysilane homopolymers
- A. Diaz
- M. Baier
- et al.
- 2019
- JES
Ion Pairing Limits Crystal Growth in Metal-Oxygen Batteries
- Naga Phani Aetukuri
- Gavin O. Jones
- et al.
- 2018
- ACS Energy Letters
Combining accurate O2 and Li2O2 assays to separate discharge and charge stability limitations in nonaqueous Li-O 2 Batteries
- Bryan D. McCloskey
- Alexia Valery
- et al.
- 2013
- Journal of Physical Chemistry Letters
Implications of CO2 contamination in rechargeable nonaqueous Li-O2 batteries
- Sanketh R. Gowda
- A. Brunet
- et al.
- 2012
- Journal of Physical Chemistry Letters
Fundamental study of extreme UV resist line edge roughness: Characterization, experiment, and modeling
- Ramakrishnan Ayothi
- Lovejeet Singh
- et al.
- 2012
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Measurements of acid generation by extreme ultraviolet irradiation in lithographic films
- Martin Glodde
- Dario L. Goldfarb
- et al.
- 2007
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Spatial-frequency multiplication via absorbance modulation
- Hsin-Yu Tsai
- Gregory M. Wallraff
- et al.
- 2007
- Applied Physics Letters
Nanoporous thin films with hydrophilicity-contrasted patterns
- Ho-Cheol Kim
- Cortney R. Kreller
- et al.
- 2004
- Chemistry of Materials
Polysilanes: Photochemistry and deep UV lithography
- R.D. Miller
- G.M. Wallraff
- et al.
- 2004
- Polymer Engineering & Science