Optical lithography: Introduction
- G. Chiu
- J.M. Shaw
- 1997
- IBM J. Res. Dev
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21 results for George L. Chiu
Overview of optical interconnect technology
- George Chiu
- Modest M. Oprysko
- 1990
- SPIE Advances in Intelligent Robotics Systems 1990
Picosecond photoelectron microscope for high-speed testing of integrated circuits
- P.G. May
- Y. Pastol
- et al.
- 1990
- IBM J. Res. Dev
Modal Dispersion and Attenuation Measurements of Silicon Nitride and Silicon Oxynitride Waveguides Using a Streak Camera
- Paul May
- S. Basu
- et al.
- 1990
- Journal of Lightwave Technology
Electron beam testing of integrated circuits using a picosecond photoelectron scanning electron microscope
- Y. Pastol
- J.-M. Halbout
- et al.
- 1989
- Scanning Microscopy
High speed electron beam testing
- George Chiu
- Jean-Marc Halbout
- et al.
- 1989
- Microelectronic Engineering
Photoelectron scanning electron microscope (PSEM) for high speed noncontact testing
- P.G. May
- J.-M. Halbout
- et al.
- 1987
- Advances in Semiconductors and Semiconductor Structures 1987
Noncontact High-Speed Waveform Measurements with the Picosecond Photoelectron Scanning Electron Microscope
- Paul G. May
- Jean-Marc Halbout
- et al.
- 1988
- IEEE JQE
Ultrashort electron-pulse probing of integrated circuits
- Jean-Marc Halbout
- Paul May
- et al.
- 1988
- Journal of Modern Optics
High speed device testing and internal node diagnostics
- George Chiu
- Jean-Marc Halbout
- et al.
- 1987
- Microlithography 1987