Atomic layer deposition of metal and nitride thin films: Current research efforts and applications for semiconductor device processing
- H. Kim
- 2003
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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168 results at Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Diffusion barrier properties of very thin TaN with high nitrogen concentration
- S.M. Rossnagel
- H. Kim
- 2003
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Texture and resistivity of dilute binary Cu(Al), Cu(In), Cu(Ti), Cu(Nb), Cu(Ir), and Cu(W) allow thin films
- A. Gungor
- K. Barmak
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Probing surface and bulk chemistry in resist films using near edge x-ray absorption fine structure
- Joseph L. Lenhart
- Ronald L. Jones
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Process integration of self-assembled polymer templates into silicon nanofabrication
- K.W. Guarini
- C.T. Black
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Characteristics of ultrathin Ta and TaN films
- S.M. Rossnagel
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Fabrication and electrical characterization of top gate single-wall carbon nanotube field-effect transistors
- S.J. Wind
- J. Appenzeller
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Growth dynamics of titanium silicide nanowires observed with low-energy electron microscopy
- P.A. Bennett
- B. Ashcroft
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Localized and directed lateral growth of carbon nanotubes from a porous template
- S.J. Wind
- R. Martel
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Low stress development of poly(methylmethacrylate) for high aspect ratio structures
- M.J. Rooks
- E. Kratschmer
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures