Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
In this study, the effect of Cluster Carbon implantation and thermal annealing for recrystallization on the properties of phosphorus doped Si (Si
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
J. Tersoff
Applied Surface Science
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
D.D. Awschalom, J.-M. Halbout
Journal of Magnetism and Magnetic Materials