G. Tsutsui, Ruqiang Bao, et al.
IEDM 2016
We report record low 8.4 × 10-10Ω-cm2 n-type S/D contact resistivity with laser-induced solid/liquid phase epitaxy of Si
G. Tsutsui, Ruqiang Bao, et al.
IEDM 2016
Oleg Gluschenkov, Heng Wu, et al.
IEDM 2018
Zuoguang Liu, Oleg Gluschenkov, et al.
VLSI Technology 2017
D. Sil, Yasir Sulehria, et al.
IITC 2021